Fully optimised for Print-on-Print and Selective Emitter processes, Apollo offers ±10 micron accuracy @ 2 Cpk capability and advanced automated features to deliver repeatability, accuracy and high performance - in a low footprint, single line configuration.
Throughput 1500 wafers per hour (wph) at 180mm per second print speed
Accuracy +/- 10µm @ 2 Cpk
Breakage rate < 0.15%
Topside cameras for ficucial or pattern alignment
380 and 450mm screen size options
Optional Weigh Station, Paste Dispense and Wafer Breakage Sensor
Optional Print Inspection station, compatible with popular inspection systems
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